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Immersion lithography
Results: 40

#	Item
11	Datasheet Sentaurus Lithography Predictive Modeling of Lithographic Processes Overview Add to Reading List Source URL: www.synopsys.com Language: English - Date: 2014-11-07 14:34:17 Computational lithography Extreme ultraviolet lithography Multiple patterning Photolithography Immersion lithography Optical proximity correction Resist Lithography Electron beam lithography Microtechnology Materials science Technology
12	PDF Document Add to Reading List Source URL: spie.org Language: English - Date: 2015-04-13 10:58:59 Extreme ultraviolet lithography Extreme ultraviolet Microtechnology Immersion lithography Computational lithography Interference lithography Photoresist Photomask College of Nanoscale Science and Engineering Materials science Electromagnetic radiation Technology
13	Y–Y E A • • • • • Add to Reading List Source URL: spie.org Language: English - Date: 2015-04-13 09:40:24 SPIE Semiconductor device fabrication Extreme ultraviolet lithography Computational lithography Immersion lithography Nanoimprint lithography Applied Materials Synopsys Lithography Materials science Microtechnology Technology
14	At The Edge EM EXPLORER Oblique Incidence Effects of 3D Mask in Hyper-NA Lithography Add to Reading List Source URL: emexplorer.net Language: English - Date: 2010-03-03 02:08:00 Immersion lithography Resist Simulation
15	Conference 9235: Photomask Technology[removed]CONNECTING MINDS. ADVANCING LIGHT. 20 Add to Reading List Source URL: www.spie.org Language: English - Date: 2015-03-19 10:43:13 Extreme ultraviolet lithography Photomask Optical proximity correction Electronic design automation Mask inspection Mask shop Photolithography Immersion lithography KLA Tencor Materials science Microtechnology Technology
16	Extreme Ultraviolet Lithography: Towards the Next Generation of Integrated Circuits THE VIEWPOINT - Optical lattice solitons: Guiding and routing light at will Add to Reading List Source URL: opfocus.org Language: English - Date: 2010-03-11 13:42:27 Extreme ultraviolet lithography Multiple patterning Immersion lithography Photolithography Extreme ultraviolet Photoresist 11 nanometer X-ray lithography ASML Holding Microtechnology Materials science Technology
17	Production Technologies for Mass-production Pioneering Development of Immersion Lithography UCHIYAMA Takayuki Abstract NEC Electronics has pioneered the development of the immersion lithography technology in order to de Add to Reading List Source URL: www.nec.com Language: English - Date: 2012-09-11 09:28:37 Extreme ultraviolet lithography Multiple patterning Resist Semiconductor device fabrication Lithography 32 nanometer Solid immersion lens Photolithography Stepper Materials science Technology Immersion lithography
18	Datasheet Sentaurus Lithography Predictive Modeling of Lithographic Processes Overview Add to Reading List Source URL: www.synopsys.com Language: English - Date: 2014-11-07 14:34:17 Computational lithography Extreme ultraviolet lithography Multiple patterning Photolithography Immersion lithography Optical proximity correction Resist Lithography Electron beam lithography Microtechnology Materials science Technology
19	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-30 21:14:00 Extreme ultraviolet lithography Multiple patterning Nanoimprint lithography Immersion lithography Electron beam lithography Maskless lithography Photomask Resist Lithography Microtechnology Materials science Technology
20	PRESS-RELEASE[removed]Mapper Lithography, a Portfolio Company of RUSNANO, Starts Production of Key Elements for a New Generation of Lithography Equipment A plant for the production of electronic optical elements usin Add to Reading List Source URL: en.rusnano.com Language: English - Date: 2014-07-03 02:40:24 Microtechnology Maskless lithography Rusnano Lithography Photolithography Microelectromechanical systems Electron beam lithography Immersion lithography Photoresist Materials science Technology Nanotechnology

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